ASML 4022.476.98131

ASML 4022.476.98131

ASML 4022.476.98131

ASML 4022.476.98131

关键参数解析

1. 

光学系统参数

○ 

波长范围：支持193nm ArF光源，兼容新EUV技术扩展

○ 

数值孔径（NA）：0.33设计，实现亚微米级分辨率

○ 

焦深（DOF）：≥1.2μm，适应高复杂度晶圆工艺

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